Millions of components to be easily and concurrently fabricated. Multiplicity refers to the batch fabrication inherent in semiconductor processing, which allows thousands or Miniaturization enables the production of compact, quick-response devices. The three characteristic features of MEMS fabrication technologies are miniaturization, multiplicity, and microelectronics. MEMS fabrication uses many of the same techniques that are used in the integrated circuit domain such as oxidation, diffusion, ion implantation, LPCVD, sputtering, etc., and combines these capabilities with highly specialized micromachining processes. MEMS fabrication is an extremely exciting endeavor due to the customized nature of process technologies and the diversity of processing capabilities. Processing such as plasma etch, thin film deposition and photolithography. The micrometer-scale moving parts of MEMS devices are fabricated using techniques derived from semiconductor IC The basic premise behind the concept of MEMS is that the efficiencies of high volume production and low unit cost achieved by the microelectronics industry over the past 50 years can be translated to devices in which mechanical and electrical components are integrated within a single silicon chip MEMS devices are all around us today from accelerometers and gyroscopes that enable todays sophisticated mobile interfaces to automobile navigation and airbag sensors, and medical and communications devices. The past decade has seen the rapid growth of microelectromechanical systems (MEMS) as an important area of technology, growth which is expected to continue well into the next century. Keywords Fabrication Technologies, IC Fabrication, Bulk Micromachining and Wafer Bonding, Surface Micromachining, Micromolding, Deep Silicon Etch, Dielectric Deposition, Metallization, CMP (Chemical Mechanical Planarization), Epitaxial Deposition, Metrology and Inspection, Low Cost MEMS Fabrication using Injection Molding Given the emerging importance of MEMS, it is instructive to review the fabrication technology, and to examine new developments in the field. Because of this, icroelectromechanical systems (MEMS) are now poised to capture large segments of existing sensor markets and to catalyze the development of new markets. Micromachining technology has greatly benefited from the success of the integrated circuits industry, borrowing materials, processes, and toolsets. They often have moving components that allow a physical or analytical function to be performed by the device in addition to their electrical functions. Professor, Department of Mechanical, Mangalore Institute of Technology & Engineering (MITE)Ībstract: Microelectromechanical systems (MEMS) have recently become an important area of technology, building on the success of the microelectronics industry over the past 50 years.MEMS devices are manufactured using similar microfabrication techniques as those used to create integrated circuits. Tech scholar, Department of Mechanical, Mangalore Institute of Technology & Engineering (MITE)
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